• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
  • 引用文献
  • 法律状态
  • 优先权
    • 专利摘要:
    The invention relates to a generator of a steerable magnetic field comprising a magnetic circuit comprising: a first pole end (37) with a vertical axis disposed above a horizontal plane; and at least two second pole ends (28A-28D) disposed symmetrically on said horizontal plane, the generator further comprising coils arranged such that each magnetic circuit portion connecting two polar ends passes within at least one coil, these coils being adapted to be connected to circuits adapted to circulate currents of adjustable intensities and selected directions.
    公开号:FR3046695A1
    申请号:FR1650184
    申请日:2016-01-11
    公开日:2017-07-14
    发明作者:Isabelle Joumard；Ricardo Sousa
    申请人:Centre National de la Recherche Scientifique CNRS；Commissariat a lEnergie Atomique CEA；Commissariat a lEnergie Atomique et aux Energies Alternatives CEA；
    IPC主号:
    专利说明:

    MAGNETIC FIELD GENERATOR
    Field
    The present application relates to the field of magnetic field generators, and more particularly to a device generating an adjustable magnetic field in intensity and direction.
    Statement of Prior Art
    FIG. 1 represents an example of a magnetic memory point 1 whose characteristics one wishes to verify.
    The memory point 1 is formed on a silicon wafer 3. The silicon wafer 3 is fixed on an X, Y and Z positioning device, not shown, of a test equipment. This device makes it possible to position the wafer with a precision of the order of a micrometer. The memory point comprises portions 5 of conductive and magnetic layers located between two portions of metal layers 7. The portions of metal layers are extended by contacts 9 located in the same horizontal plane on either side of the memory point. However, there may be a difference of a few micrometers between the contact levels.
    To test the memory point, test points 11 are positioned on the contacts 9, the distance DI between the test points 11 being of the order of a hundred micrometers. A magnetic field of adjustable intensity and direction is applied to the memory point. The variations in electrical resistance between the test points as a function of the intensity and the direction of the magnetic field make it possible to characterize the memory point 1.
    Note that, to position the test tips 11 and create the magnetic field, only the space above the silicon wafer is available, the space under the wafer being used by the positioning device.
    It is therefore desired to have a magnetic field generator making it possible to produce a magnetic field of adjustable intensity and direction, this generator remaining entirely situated above the surface of the wafer containing the memory point.
    More generally, it is sought to dive into a steerable magnetic field of the components arranged on a wafer of which only one side is available to generate the magnetic field.
    Known generation devices in a half space of a magnetic field do not allow to adjust each vertical or horizontal component of the magnetic field independently of the other components and pose various implementation problems.
    It is therefore desired to have a magnetic field generator making it possible to produce in a half space a magnetic field of which each vertical and horizontal component can be adjusted independently. summary
    Thus, an embodiment provides a generator of a steerable magnetic field comprising a magnetic circuit comprising: a first polar end of vertical axis disposed above a horizontal plane; and at least two second pole ends disposed symmetrically on said horizontal plane, the generator further comprising coils arranged in such a way that each magnetic circuit portion connecting two pole ends passes inside at least one coil, these coils being adapted to be connected to circuits adapted to circulate currents of adjustable intensities and of selected directions.
    According to one embodiment, the pole ends of each pair of neighboring second pole ends have parallel vertical faces arranged symmetrically with respect to a plane containing the vertical axis.
    According to one embodiment, the first polar end has the shape of a truncated cone having a circular lower face disposed at a height of between 0.5 and 5 mm above said horizontal plane.
    According to one embodiment, the generator comprises four second pole ends symmetrical with respect to two orthogonal planes containing the vertical axis.
    According to one embodiment, each polar end is at the end of an arm connected to a frame.
    According to one embodiment, the arm associated with each second polar end extends horizontally a bar surrounded by a coil.
    According to one embodiment, the arm associated with the first polar end is connected to a horizontal rod connected to the middle of opposite sides of the frame, a coil being disposed around each half of the horizontal rod.
    According to one embodiment, the arm associated with the first polar end is surrounded by a coil.
    According to one embodiment, the generator comprises two second polar ends, each of the first and second polar ends being at the end of an arm connected to a rod, the arm associated with the first polar end being connected to the center of the rod. , and a coil being disposed around each half of the rod.
    According to one embodiment, the arm associated with the first polar end is surrounded by a coil.
    Brief description of the drawings
    These and other features and advantages will be set forth in detail in the following description of particular embodiments in a non-limiting manner with reference to the accompanying drawings in which:
    Figure 1 shows an example of a magnetic memory point; Fig. 2A is a perspective view of an embodiment of a magnetic circuit; Figure 2B is a bottom view of a portion of the magnetic circuit shown in Figure 2A; Figure 2C is a side view of a portion of a magnetic circuit positioned above a wafer to be tested; Figure 3 is a simplified illustration of the magnetic circuit shown in Figure 2A and coils traversed by currents; Fig. 4A is a perspective view of a simplified embodiment of a magnetic field generator; Figure 4B is a bottom view of a portion of the generator of Figure 4A; and FIG. 5 is a partial bottom view of an alternative magnetic circuit.
    detailed description
    The same elements have been designated by the same references in the various figures and, in addition, the various figures are not drawn to scale. For the sake of clarity, only the elements useful for understanding the described embodiments have been shown and are detailed. In particular, coil supply circuits are not shown.
    In the description which follows, unless otherwise specified, when reference is made to absolute position qualifiers, such as the terms "left", "right", etc., or relative, such as the terms "above", " below "," upper "," lower ", etc., or with qualifiers for orientation, such as the terms" horizontal "," vertical ", etc., reference is made to the orientation of the element concerned in the target figure. Unless otherwise specified, the expression "of the order of" means, with respect to an orientation, to within 10 degrees, preferably to within 5 degrees.
    Fig. 2A is a perspective view of an embodiment of a magnetic circuit of a magnetic field generator. The generator comprises coils, not shown in FIG. 2A, arranged around certain parts of the magnetic circuit. Figure 2B is a bottom view, on a different scale, of a portion of the magnetic circuit 20 near the vertical axis Z of the generator. Figure 2C is a side view, on a different scale, of a portion of the magnetic circuit 20 positioned above a wafer containing a magnetic memory point to be tested.
    The magnetic circuit is made of a soft ferromagnetic material, for example soft iron. The magnetic circuit 20 comprises a square frame 22 of axis Z. A cylindrical vertical bar 24 extends downwards from each of the corners of the frame 22. Each bar 24 extends towards the axis Z by a radial arm 26 Each radial arm 26 is extended by a respective polar tip 28A to 28D directed towards the Z axis. The pole ends 28A to 28D have lower faces located in the same horizontal plane 29 (visible in Figure 2C). For example, the frame 22 is in a circle whose diameter is between 100 and 200 mm. The dimension along the Z axis, or height, of the entire circuit is between 100 and 200 mm. Each bar 24 may have a diameter of between 8 and 20 mm.
    Bars 30 extend vertically downwards from the media on two opposite sides of the frame 22. The ends of the bars 30 are connected by a horizontal rod 32. A connecting block 34 centered on the Z axis is located in the middle The connecting block 34 is extended downwards by a vertical cylindrical arm 36. The cylindrical arm 36 has a polar end 37 in the shape of a truncated cone of Z axis. The cone is terminated by a circular horizontal face. 38 located at a height H above the horizontal plane 29.
    In bottom view, as illustrated in FIG. 2B, the polar ends 28A to 28D delimit a cross-shaped space 39 whose center is occupied by the polar end 37. The cross is arranged along orthogonal horizontal axes oriented in X and Y, the Y axis being parallel to the direction of the rod 32. Thus, the pole ends 28A to 28D are arranged symmetrically with respect to two orthogonal vertical planes passing through the Z axis. The polar ends 28A to 28D may have respective vertical faces 40A to 40D parallel to the Y axis. The pole ends 28A to 28D may have respective vertical faces 42A to 42D parallel to the X axis. By way of example, the distances D 2 separating the faces vertical poles 28A to 28D adjacent are equal and between 5 and 15 mm.
    Figure 2C is a sectional side view illustrating a lower portion of the magnetic field generator facing a wafer 44 comprising a magnetic memory point 46 provided with contacts 48. The wafer is attached to a not shown positioning device. The magnetic field generator is arranged in such a way that the horizontal plane 29 of the magnetic circuit is located above the upper face of the wafer 44, the memory point being disposed under the face 38 of the polar end 37. The structure of the generator is such that a space is available for positioning test points 49 on the contacts 48. For example, the height between the horizontal plane 29 and the upper face of the wafer is between 0.5 and 5 mm.
    FIG. 3 is a simplified illustration of the magnetic circuit 20 shown in FIG. 2A and coils traversed by currents according to an example of current configuration. Each element of the magnetic circuit 20 is represented in the form of an elongate cylinder in the direction of propagation of a magnetic induction flux carried by the element. By way of example, the actual coils have outside diameters of between 50 and 70 mm. Each coil may be formed by winding a copper conductor wire, the number of turns of lead wire depending on the diameter of the wire. Each coil may comprise several hundred turns of conductive wire, for example between 200 and 3000 turns.
    Around each bar 24 associated with one of the ends 28A to 28D, there is a respective coil 50A to 50D. Coils 52A and 52B are disposed around the portions of the rod 32 located on either side of the connection with the arm 36. The coils 50A to 50D, 52A and 52B may be identical.
    The coils are connected to unrepresented power circuits. These circuits make it possible to circulate a current of direction and intensity chosen in each coil.
    In the example of current configuration illustrated in FIG. 3, currents of identical intensity and direction flow in the coils 50A to 50D so as to produce in the bars 24 magnetic induction fluxes 54A to 54D oriented downwards. . Currents of opposite intensity and direction flow in coils 52A and 52B. The currents in the coils 52A and 52B produce respective magnetic induction fluxes 56A and 56B away from the Z axis, resulting in a flow directed upwardly into the vertical arm 36.
    As indicated previously, the pole ends 28A to 28D are symmetrical with respect to two orthogonal vertical planes passing through the Z axis. Therefore, on the vertical Z axis, the X-axis field components and along the Y axis cancel each other out. Thus, the magnetic field BZ created below the polar end 37 around the magnetic memory point of FIG. 2C is directed along the vertical axis Z and oriented upwards. The conical shape of the polar end 37 makes it possible to concentrate in the cone the magnetic induction which propagates in the arm. The inventors have shown by simulations that there exists an optimum value of the height H separating the plane 29 from the face 38 which makes it possible to obtain a quasi-uniform magnetic field of maximum intensity under the polar end 37, corresponding by for example, at a magnetic induction greater than 0.5 T. For example, the height H is between 0.5 and 2 mm. The face 38 may have a diameter of between 3 and 7 mm. The angle between the Z axis and the inclined face of the cone may have a value between 40 and 60 degrees. The arm 36 may have a diameter of between 8 and 20 mm.
    A magnetic field directed along the Y axis defined in relation with FIG. 2B and oriented from the left to the right is obtained if, from the current configuration of FIG. 3, the directions of the currents in the coils 50A are reversed. , 50B and 52A. In this case, the magnetic induction fluxes produced by the coils are canceled in the vertical arm 36. As indicated above, the ends 28A to 28D may have respective vertical faces 42A to 42D parallel to the X axis. faces 42A to 42D makes it possible to obtain a quasi-uniform magnetic field without component along the X axis under the face 38. In addition, the dimension along the Z axis or thickness of the polar ends 28A to 28D may be smaller than the thickness of the arms 26, in order to obtain a high magnetic field. The currents in the coils 52A and 52B can also be canceled, and the generator then produces a magnetic field along the Y axis of reduced intensity.
    An X-axis magnetic field is obtained from the current pattern illustrated in FIG. 3 by reversing the current directions in the coils 50A and 50D and canceling the currents in the coils 52A and 52B. The operation is similar to the operation that produces a field oriented along the Y axis. In general, by combinations of currents of selected currents and currents flowing in the coils, it is advantageous to choose the orientation and the intensity of the magnetic field under the polar end 37 in a volume below the plane 29, the magnetic field generator being entirely located above the plane 29.
    Although coils disposed around elements of the magnetic circuit 20 have been described above in a particular configuration, other configurations are possible. Alternatively, the coils 50A to 50D may be replaced by coils located around the sides of the frame 22. A coil may be disposed about each side of the frame 22 parallel to the Y axis. Each side parallel to the axis X may be surrounded by two coils disposed on either side of the vertical bar 30. In another variant, the coils 52A and 52B may be replaced by a single coil disposed around the arm 36. In this case, the bars 30 may be removed, the rod 32 being directly connected to the middle of the sides of the frame 22 associated.
    FIG. 4A is a perspective view of an embodiment of a magnetic field generator 80. FIG. 4B is a bottom view of a portion of the magnetic circuit of the generator 80 close to the Z axis.
    The magnetic field generator 80, simpler than the generator 20 described above, makes it possible to provide a magnetic field of adjustable stepless intensity in the YZ plane. This generator comprises two identical coils 82 arranged around a horizontal rod 84 on either side of a connecting block 86 located in the middle of the rod 84. The connecting block 86 is extended downwards by a cylindrical arm 88. The cylindrical arm 88 has a polar end 90 in truncated cone shape of axis Z. The cone ends in a circular horizontal face 92. Vertical bars 94 extend from the ends of the rod 84 and extend horizontally by convergent arms 96. The arms 96 have lower faces 98 included in a horizontal plane 100 common to both faces and located at a height H under the face 92. In view from below, the arms approach the axis Z. By way of example, the arms 96 approach the Z axis in directions making angles of the order of 45 ° with the direction of the horizontal rod 84. Each arm 96 ends with a polar end 102. The polar ends 102 have two faces vertically parallel spacers 104 perpendicular to the Y axis and symmetrical with respect to a plane passing through the Z axis.
    In the illustrated embodiment, horizontal supports 106 extend from each end of the rod 84 and serve to secure the generator.
    Figure 5 is a partial bottom view of an alternative magnetic circuit, corresponding to the magnetic circuit shown in Figures 4A and 4B wherein the arms 96 have been replaced by similar arms 96 'with polar ends 102'. Unlike the arms 96 of FIGS. 4A and 4B, the arms 96 'approach the Z axis parallel to the direction of the horizontal rod 84. The Z axis lies between parallel vertical faces 104' of the polar ends 102 '. The vertical faces 104 'are orthogonal to the Y axis and symmetrical with respect to a plane passing through the Z axis.
    In the embodiment illustrated in FIGS. 4A and 4B and in the variant of FIG. 5, the coils 82 are connected to unrepresented circuits making it possible to circulate a current of selected intensity and direction in each coil.
    When currents 108 of equal intensities and opposite directions circulate in the coils 82, the magnetic induction fluxes created in each half of the rod by each of the currents are added in the bar 88. A magnetic field B2 is then obtained. oriented along the axis Z under the face 92 of the polar end 90. When currents 110 of the same direction circulate in the coils, a magnetic field directed along the axis Y is obtained. In general, a combination of currents in the coils 82 provides a current of adjustable intensity and orientation selected in the YZ plane.
    The magnetic field generator 80 is entirely located above the plane 100 and allows, with only two coils, to produce in a volume below the plane 100 a magnetic field whose intensity and orientation can be adjusted in the YZ plan.
    In a variant not shown, a coil may be arranged around the vertical arm 88, in order to increase the intensity of the component of the magnetic field along the axis Z.
    Particular embodiments have been described. Various variations and modifications will be apparent to those skilled in the art. In particular, although particular configurations of magnetic circuits and coils have been described, other configurations are possible, the most important being firstly that the magnetic circuit comprises a vertical arm provided with a polar end located above a horizontal plane and comprises at least two symmetrical polar ends disposed on the horizontal plane, and secondly that each magnetic circuit portion connecting two polar ends passes inside at least one coil.
    In addition, in the described embodiments, magnetic field generators are used to test a magnetic memory point formed on a silicon wafer by connecting the memory point with test tips. A generator of the type described can also be used to perform magneto-optical tests of a magnetic memory point disposed on a wafer, one side of the wafer then being used by the generator and the other side remaining available for optical equipment. Such a generator may also be used to test multiple magnetic memory points simultaneously, or to test memory dot arrays.
    权利要求:
    Claims (10)
    [1" id="c-fr-0001]
    1. Generator of a steerable magnetic field comprising a magnetic circuit comprising: a first polar end (37; 90) of vertical axis (Z) disposed above a horizontal plane (29; 100); and at least two second pole ends (28A-28D; 102; 102 ') arranged symmetrically on said horizontal plane, the generator further comprising coils (50A-50D, 52A, 52B; 82) arranged such that each portion of magnetic circuit connecting two pole ends passes inside at least one coil, these coils being adapted to be connected to circuits adapted to circulate currents of adjustable intensities and selected directions.
    [2" id="c-fr-0002]
    A generator according to claim 1, wherein the pole ends (28A to 28D; 102; 102 ') of each pair of adjacent second pole ends have parallel vertical faces (40A to 40D, 42A to 42D; 104; 104'). arranged symmetrically with respect to a plane containing the vertical axis (Z).
    [3" id="c-fr-0003]
    The generator according to claim 1 or 2, wherein the first pole end (37; 90) is in the form of a truncated cone having a circular underside (38; 92) disposed at a height (H) of between 0, 5 and 5 mm above said horizontal plane (29; 100).
    [4" id="c-fr-0004]
    4. Generator according to any one of claims 1 to 3, comprising four second polar ends (28A to 28D) symmetrical with respect to two orthogonal planes containing the vertical axis.
    [5" id="c-fr-0005]
    5. Generator according to claim 4, wherein each pole end is at the end of an arm (26, 36) connected to a frame (22).
    [6" id="c-fr-0006]
    6. Generator according to claim 5, wherein the arm (26) associated with each second pole end (28A to 28D) horizontally extends a bar (24) surrounded by a coil (50A to 50D).
    [7" id="c-fr-0007]
    7. Generator according to claim 5 or 6, wherein the arm (36) associated with the first polar end (37) is connected to a horizontal rod (32) connected to the middle of opposite sides of the frame (22), a coil ( 52A, 52B) being disposed around each half of the horizontal rod.
    [8" id="c-fr-0008]
    8. Generator according to claim 6 or 7, wherein the arm (36) associated with the first pole end (37) is surrounded by a coil.
    [9" id="c-fr-0009]
    Generator according to any one of claims 1 to 3, comprising two second pole ends (102; 102 '), each of the first and second pole ends (90; 102; 102') being at the end (88, 96, 96 ') of an arm connected to a rod (84), the arm (88) associated with the first polar end being connected to the center of the rod, and a coil (82) being disposed around each half of the rod.
    [10" id="c-fr-0010]
    10. Generator according to claim 9, wherein the arm (88) associated with the first pole end (90) is surrounded by a coil.
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    法律状态:
    2016-12-20| PLFP| Fee payment|Year of fee payment: 2 |
    2017-07-14| PLSC| Publication of the preliminary search report|Effective date: 20170714 |
    2018-01-31| PLFP| Fee payment|Year of fee payment: 3 |
    2020-01-30| PLFP| Fee payment|Year of fee payment: 5 |
    2020-12-11| CL| Concession to grant licences|Name of requester: SATT LINKSIUM GRENOBLE ALPES, FR Effective date: 20201103 |
    2021-01-28| PLFP| Fee payment|Year of fee payment: 6 |
    2022-01-31| PLFP| Fee payment|Year of fee payment: 7 |
    优先权:
    申请号 | 申请日 | 专利标题
    FR1650184A|FR3046695B1|2016-01-11|2016-01-11|MAGNETIC FIELD GENERATOR|
    FR1650184|2016-01-11|FR1650184A| FR3046695B1|2016-01-11|2016-01-11|MAGNETIC FIELD GENERATOR|
    CN201780006165.1A| CN108885932A|2016-01-11|2017-01-05|Magnetic field generating|
    SG11201805850SA| SG11201805850SA|2016-01-11|2017-01-05|Magnetic field generator|
    US16/069,079| US11139099B2|2016-01-11|2017-01-05|Magnetic field generator|
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    PCT/FR2017/050034| WO2017121947A1|2016-01-11|2017-01-05|Magnetic field generator|
    EP17711699.3A| EP3403268B1|2016-01-11|2017-01-05|Magnetic field generator|
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    JP2021184934A| JP2022027765A|2016-01-11|2021-11-12|Magnetic field generator|
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